De-risking 300 mm Class Diamond Coating

Carat Systems' 915 MHz high-power MWCVD platform addresses large-area diamond coating scale-up beyond the practical limits of conventional 2.45 GHz systems. As coating area increases, the main constraint shifts from plasma chemistry alone to thermal coupling, substrate fixturing, and process uniformity.

Core Scale-Up Insight

Results from 100 mm, 150 mm, and 200 mm diamond coating work show that larger-area growth becomes increasingly sensitive to thermal engineering, edge effects, field structure, and substrate coupling.

• 100 mm at 10 kW, 2.45 GHz supports stable plasma and reproducible uniform growth.
• 150 mm to 200 mm scale shows increasing thermal nonuniformity and coupling constraints.
• 300 mm class plasma footprint has been demonstrated using 915 MHz operation at approximately 100 kW.

Discuss 915 MHz Scale-Up