Double seals and conflat flanges for world class purity from Nitrogen contamination.
PPB Nitrogen leak purity implemented with differentially pumped O rings and Conflat Flange on all seals (compare with O rings on prior systems)
Highest available MW power (12kW available, 15KW in testing) for larger area/higher growth rate processes.
6-600 Torr pressure range
Advanced process control and monitoring including internet access to system control functions.
Customizable fixturing, viewports for in-situ monitoring.
Powerful software includes 24/7 all parameter logging, advanced (trailing) interlocks and web/mobile access to system data and control
Bias Enhanced Nucleation (BEN) for heteroepitaxy See - Nature.com
100mm (4") diameter wafer heater providing +-10% uniformity microcrystalline thin diamond films
Temperature controlled Translation Stage for large single crystal growth
No line of sight between quartz microwave window and plasma to reduce silicon contamination from the window - a common issue due to atomic hydrogen reaction with quartz silicon dioxide.
Stable plasma for widest range in pressure, power and substrate geometry
Integrated Helium leak testing port
Power upgradeable to 15KW (retrofitted to existing systems)
World Class Electronic Performance, 100mm diamond coating diameter
White Diamond Tube: 5mm ID, 2 cm long
DEF Color Multicarat weight diamond gems
Polycrystalline and Single Crystal Detectors
